OFR UV Lenses

OFR Globe

Apodizers

Beam Expander

BestForm Laser Lenses
OFR manufactures and maintains in stock its series of BestForm Laser Lenses. These are designed for minimum spherical aberration, and when not exceeding optimum beam diameter (see table below), will produce focal spots within diffraction-limit theory. These lenses can be used interchangeably for focusing, expanding or collimating.

Surface Quality
Polish exceeds 10-5 and sphericity better than 1/10-wave over the aperture at the design wavelength. All lenses are polished to the highest spherical figure and fineness consistent with optimum performance in all respects: minimum blur-circle, minimum wavefront distortion, minimum scattering loss, and maximum transmittance of energy.

Antireflection Coatings
All lenses are available with narrow-band or broadband antireflection coatings peaked for the major wavelength of operation, at which transmittance will exceed 99%. When ordering, add wavelength (in nm) as final dash number in Catalog Part Number. For example, LL-25-63-633, etc.

BestForm Laser Lenses are designed with minimum aberration ratio of the radii of both surfaces.

Mechanical Specifications
Diameter	+0,-0.1 mm
Thickness	± 0.1 mm
Bevels	0.3 mm x 45°
Radii	± 2%

LASER LENSES, 193 nm
OFR manufactures 193 nm Laser Lenses in two excimer-grades, CaF2 and fused silica. OFR feels that optical performance of either type should be equivalent. However, in spite of significant improvements in materials since the arrival of the ArF laser, limited performance data leave questions unanswered. Therefore, the choice of CaF2 or fused silica is open to interpretation. Please discuss with OFR.

LASER LENSES for ArF EXCIMER LASERS, 193 nm

Material:Excimer Grade CaF2
Design Wavelength 193 nm
Index at 193 nm 1.5045
CaF2 transmits 130nm-9.6µm

Material: Excimer Grade Fused Silica
Design Wavelength 193 nm
Index at 193 nm 1.5604
Fused Silica transmits 180nm-2.3µm

Antireflection Coating
Wavelength	Bandwidth	Avg. Reflectance	Power Rating
193 nm	± 5 nm	< 0.5%	400 MW/cm²
*Power rating based upon 20ns pulses, 20Hz

Excimer Grade Fused Silica (SiO2)

Catalog Number	Material	Diameter	Focal Length at 193 nm	Optimum Beam Dia.	Theoretical Focal Spot	R1 mm	R2 mm	CT
LLU-13-17-193	FS*	½" dia.	17.4 mm	2.1 mm	2.0 µm	12.70	-38.89	3.5
LLU-13-17N-193	FS*	½" dia.	-17.4 mm	2.1 mm	------	-12.70	44.62	2.5
LLU-13-22-193	FS*	½" dia.	21.8 mm	2.5 mm	2.2 µm	14.00	-79.99	3.5
LLU-13-22N-193	FS*	½" dia.	-21.8 mm	2.5 mm	------	-14.6	79.99	2.5
LLU-13-35-193	FS*	½" dia.	34.8 mm	4.4 mm	2.4 µm	22.80	-121.45	3.5
LLU-13-35N-193	FS*	½" dia.	-41.7 mm	4.4 mm	------	-22.80	141.32	2.5
LLU-25-55-193	FS*	1" dia.	54.8 mm	6.2 mm	2.7 µm	36.24	-192.73	5.5
LLU-25-70-193	FS*	1" dia.	69.6 mm	7.3 mm	3.0 µm	45.59	-265.14	5.5
LLU-25-87-193	FS*	1" dia.	87.0 mm	8.7 mm	3.1 µm	57.23	-326.28	5.0
LLU-25-122-193	FS*	1" dia.	122.4 mm	11.1 mm	3.3 µm	79.99	-471.01	5.0
LLU-25-165-193	FS*	1" dia.	165.3 mm	14.0 mm	3.6 µm	111.60	-529.26	5.0
LLU-25-261-193	FS*	1" dia.	261.0 mm	19.7 mm	4.0 µm	169.63	-1061.04	4.5
Other diameters and focal lengths available on custom basis. Please inquire. * Excimer grade material; Inquire for uncoated lenses.

Fused Silica (SiO2)

Catalog Number	Material	Diameter	Focal Length at 300 nm	Optimum Beam Diameter	Theoretical Focal Spot	R1 mm	R2 mm	CT
LLU-13-20-λ	UVFS	½" dia.	20.1 mm	2.6 mm	2.5 µm	12.70	-38.89	3.5
LLU-13-20N-λ	UVFS	½" dia.	-20.1 mm	2.6 mm	------	-12.70	44.62	2.5
LLU-13-25-λ	UVFS	½" dia.	24.7 mm	3.1 mm	2.6 µm	14.00	-79.99	3.5
LLU-13-25N-λ	UVFS	½" dia.	-25.1 mm	3.1 mm	------	-14.60	79.99	2.5
LLU-13-40--λ	UVFS	½" dia.	40.0 mm	4.4 mm	3.5 µm	22.80	-121.45	3.5
LLU-13-40N-λ	UVFS	½" dia.	-40.0 mm	4.4 mm	------	-22.80	141.32	2.5
LLU-25-63-λ	UVFS	1" dia.	63.0 mm	6.2 mm	3.9 µm	36.24	-192.73	5.5
LLU-25-63N-λ	UVFS	1" dia.	-62.2 mm	6.2 mm	------	-36.24	192.73	3.0
LLU-25-80-λ	UVFS	1" dia.	80.2 mm	7.3 mm	4.2 µm	45.59	-265.14	5.5
LLU-25-80N-λ	UVFS	1" dia.	-79.5 mm	7.3 mm	------	-45.59	265.14	3.0
LLU-25-100-λ	UVFS	1" dia.	100.2 mm	8.7 mm	4.3 µm	57.23	-326.28	5.0
LLU-25-100N-λ	UVFS	1" dia.	-99.6 mm	8.7 mm	------	-57.23	326.28	2.5
LLU-25-125-λ	UVFS	1" dia.	124.6 mm	10.2 mm	4.7 µm	73.10	-353.46	5.0
LLU-25-125N-λ	UVFS	1" dia.	-123.8 mm	10.2 mm	------	-73.10	356.46	3.0
LLU-25-140-λ	UVFS	1" dia.	140.5 mm	11.1 mm	4.8 µm	79.99	-471.01	5.0
LLU-25-140N-λ	UVFS	1" dia.	-139.9 mm	11.1 mm	------	-79.99	471.01	3.0
LLU-25-160-λ	UVFS	1" dia.	161.2 mm	12.3 mm	5.0 µm	90.13	-605.94	5.0
LLU-25-190-λ	UVFS	1" dia.	189.3 mm	14.0 mm	5.2 µm	111.60	-529.26	5.0
LLU-25-240-λ	UVFS	1" dia.	241.7 mm	16.6 mm	5.5 µm	136.75	-848.13	5.0
LLU-25-300-λ	UVFS	1" dia.	300.1 mm	19.7 mm	5.8 µm	169.63	-1061.04	4.5
LLU-25-300N-λ	UVFS	1" dia.	-299.3 mm	19.7 mm	------	-169.63	1061.04	4.5
LLU-25-380-λ	UVFS	1" dia.	381.5 mm	23.5 mm	6.2 µm	225.49	-1061.04	4.5
LLU-25-475-λ	UVFS	1" dia.	482.7 mm	23.5 mm	7.7 µm	235.56	Plano	4.5
LLU-25-610-λ	UVFS	1" dia.	620.6 mm	23.5 mm	9.9 µm	302.85	Plano	4.5
LLU-25-760-λ	UVFS	1" dia.	789.8 mm	23.5 mm	12.3 µm	385.44	Plano	4.5
LLU-25-1000-λ	UVFS	1" dia.	965.2 mm	23.5 mm	16.2 µm	471.01	Plano	4.0
LLU-25-2000-λ	UVFS	1" dia.	2174.3 mm	23.5 mm	32.4 µm	1061 04	Plano	4.0
LLU-51-150-λ	UVFS	2" dia.	150.5 mm	11.9 mm	4.8 µm	84.82	-529.26	8.5
LLU-51-190-λ	UVFS	2" dia.	189.5 mm	14.0 mm	5.2 µm	111.60	-529.26	7.0
LLU-51-240-λ	UVFS	2" dia.	238.1 mm	16.6 mm	5.5 µm	136.75	-760.00	6.5
LLU-51-300-λ	UVFS	2" dia.	300.2 mm	19.7 mm	5.8 µm	169.63	-1061.04	6.5
LLU-51-380-λ	UVFS	2" dia.	381.2 mm	23.5 mm	6.2 µm	225.22	-1061.04	5.5
LLU-51-475-λ	UVFS	2" dia.	475.1 mm	27.8 mm	6.5 µm	260.90	-2068.17	5.5
LLU-51-610-λ	UVFS	2" dia.	611.6 mm	33.6 mm	6.9 µm	357.41	-1800	5.5
LLU-51-760-λ	UVFS	2" dia.	762.7 mm	39.5 mm	7.3 µm	438.93	-2440	5.0
LLU-51-1000-λ	UVFS	2" dia.	992.3 mm	48.5 mm	7.9 µm	484.25	Plano	5.0
Other diameters and focal lengths available on custom basis. Please inquire.

Excimer Grade Calcium Flouride (CaF2)

Catalog Number	Material	Diameter	Focal Length at 193 nm	Optimum Beam Dia.	Theoretical Focal Spot	R1 mm	R2 mm	CT
LLV-13-20-193	CaF2*	½" dia.	20.2 mm	2.4 mm	2.0 µm	12.20	-55.80	3.5
LLV-13-20N-193	CaF2*	½" dia.	-20.0 mm	2.4 mm	------	-12.55	55.80	2.5
LLV-13-25-193	CaF2*	½" dia.	25.1 mm	2.8 mm	2.2 µm	14.00	-121.45	3.5
LLV-13-25N-193	CaF2*	½" dia.	-25.1 mm	2.8 mm	------	-14.60	100.03	2.5
LLV-13-40-193	CaF2*	½" dia.	39.9 mm	4.0 mm	2.7 µm	23.56	-132.5	3.5
LLV-13-40N-193	CaF2*	½" dia.	-40.3 mm	4.0 mm	------	-24.07	130.57	2.5
LLV-25-63-193	CaF2*	1" dia.	62.5 mm	5.6 mm	2.9 µm	37.85	-184.35	6.0
LLV-25-80-193	CaF2*	1" dia.	79.8 mm	6.6 mm	3.0 µm	47.65	-249.54	5.0
LLV-25-100-193	CaF2*	1" dia.	100.4 mm	7.9 mm	3.3 µm	58.07	-385.44	4.5
LLV-25-140-193	CaF2*	1" dia.	140.3 mm	10.1 mm	3.5 µm	81.50	-529.26	4.5
LLV-25-190-193	CaF2*	1" dia.	189.4 mm	12.7 mm	3.8 µm	109.13	-760.00	4.0
LLV-25-300-193	CaF2*	1" dia.	300.5 mm	17.9 mm	4.3 µm	176.66	-1061.04	4.0
Other diameters and focal lengths available on custom basis. Please inquire. * Excimer grade material Inquire for uncoated lenses.

Calcium Flouride (CaF2)

Catalog Number	Material	Diameter	Focal Length at 193 nm	Optimum Beam Dia.	Theoretical Focal Spot	R1 mm	R2 mm	CT
LLV-13-20	CaF2*	½" dia.	20.2 mm	2.4 mm	2.0 µm	12.20	-55.80	3.5
LLV-13-20N	CaF2*	½" dia.	-20.0 mm	2.4 mm	------	-12.55	55.80	2.5
LLV-13-25	CaF2*	½" dia.	25.1 mm	2.8 mm	2.2 µm	14.00	-121.45	3.5
LLV-13-25N	CaF2*	½" dia.	-25.1 mm	2.8 mm	------	-14.60	100.03	2.5
LLV-13-40	CaF2*	½" dia.	39.9 mm	4.0 mm	2.7 µm	23.56	-132.5	3.5
LLV-13-40N	CaF2*	½" dia.	-40.3 mm	4.0 mm	------	-24.07	130.57	2.5
LLV-25-63	CaF2*	1" dia.	62.5 mm	5.6 mm	2.9 µm	37.85	-184.35	6.0
LLV-25-80	CaF2*	1" dia.	79.8 mm	6.6 mm	3.0 µm	47.65	-249.54	5.0
LLV-25-100	CaF2*	1" dia.	100.4 mm	7.9 mm	3.3 µm	58.07	-385.44	4.5
LLV-25-140	CaF2*	1" dia.	140.3 mm	10.1 mm	3.5 µm	81.50	-529.26	4.5
LLV-25-190	CaF2*	1" dia.	189.4 mm	12.7 mm	3.8 µm	109.13	-760.00	4.0
LLV-25-300	CaF2*	1" dia.	300.5 mm	17.9 mm	4.3 µm	176.66	-1061.04	4.0
Other diameters and focal lengths available on custom basis. Please inquire. * Excimer grade material

LASER LENSES for UV EXCIMER LASERS, 248 nm to 355 nm

Material: UV Grade Fused Silica

Design Wavelength: 300nm

Index @ 300nm

UV FS Trans.: 180nm - 2.3 µm

Wavelength	Focal Length Corrector
248 nm	- 4%
300 nm	--
355 nm	+ 2%

Laser	λ
Nd: YAG	213 nm
KrF	248 nm
Nd: YAG	266 nm
XeCl	308 nm
HeCd	325 nm
N2	337 nm
XeF	351 nm
Nd: YAG	355 nm

BROADBAND AR COATINGS
Description	Bandwidth	Avg. Reflectance	Power Rating*
UVB	240 - 360 nm	< 0.5%	200 MW/cm²
NUV	325 - 500 nm	< 0.5%	200 MW/cm²
*Power rating based upon 20ns pulses, 20Hz.

NARROWBAND AR COATINGS
Specify λ between	Bandwidth at 5% of peak	Avg. Reflectance	Power Rating*
213 - 355 nm	~ 8%	< 0.2%	500 MW/cm²
*Power rating based upon 20ns pulses, 20Hz.

For AR coating when ordering, insert AR coating at λ, for example,
LLU-25-100-UVB or LLU-25-140-248.

Catalog Number	Material	Diameter	Focal Length at 300 nm	Optimum Beam Diameter	Theoretical Focal Spot	R1 mm	R2 mm	CT
LLU-13-20-λ	UVFS	½" dia.	20.1 mm	2.6 mm	2.5 µm	12.70	-38.89	3.5
LLU-13-20N-λ	UVFS	½" dia.	-20.1 mm	2.6 mm	------	-22.70	44.62	2.5
LLU-13-25-λ	UVFS	½" dia.	24.7 mm	3.1 mm	2.6 µm	14.00	-79.99	3.5
LLU-13-25N-λ	UVFS	½" dia.	-25.1 mm	3.1 mm	------	-14.60	79.99	2.5
LLU-13-40--λ	UVFS	½" dia.	40.0 mm	4.4 mm	3.5 µm	22.80	-121.45	3.5
LLU-13-40N-λ	UVFS	½" dia.	-40.0 mm	4.4 mm	------	-22.80	141.32	2.5
LLU-25-63-λ	UVFS	1" dia.	63.0 mm	6.2 mm	3.9 µm	36.24	-192.73	5.5
LLU-25-63N-λ	UVFS	1" dia.	-62.2 mm	6.2 mm	------	-36.24	192.73	3.0
LLU-25-80-λ	UVFS	1" dia.	80.2 mm	7.3 mm	4.2 µm	45.59	-265.14	5.5
LLU-25-80N-λ	UVFS	1" dia.	-79.5 mm	7.3 mm	------	-45.59	265.14	3.0
LLU-25-100-λ	UVFS	1" dia.	100.2 mm	8.7 mm	4.3 µm	57.23	-326.28	5.0
LLU-25-100N-λ	UVFS	1" dia.	-99.6 mm	8.7 mm	------	-57.23	326.28	2.5
LLU-25-125-λ	UVFS	1" dia.	124.6 mm	10.2 mm	4.7 µm	73.10	-353.46	5.0
LLU-25-125N-λ	UVFS	1" dia.	-123.8 mm	10.2 mm	------	-73.10	356.46	3.0
LLU-25-140-λ	UVFS	1" dia.	140.5 mm	11.1 mm	4.8 µm	79.99	-471.01	5.0
LLU-25-140N-λ	UVFS	1" dia.	-139.9 mm	11.1 mm	------	-79.99	471.01	3.0
LLU-25-160-λ	UVFS	1" dia.	161.2 mm	12.3 mm	5.0 µm	90.13	-605.94	5.0
LLU-25-190-λ	UVFS	1" dia.	189.3 mm	14.0 mm	5.2 µm	111.60	-529.26	5.0
LLU-25-240-λ	UVFS	1" dia.	241.7 mm	16.6 mm	5.5 µm	136.75	-848.13	5.0
LLU-25-300-λ	UVFS	1" dia.	300.1 mm	19.7 mm	5.8 µm	169.63	-1061.04	4.5
LLU-25-300N-λ	UVFS	1" dia.	-299.3 mm	19.7 mm	------	-169.63	1061.04	4.5
LLU-25-380-λ	UVFS	1" dia.	381.5 mm	23.5 mm	6.2 µm	225.49	-1061.04	4.5
LLU-25-475-λ	UVFS	1" dia.	482.7 mm	23.5 mm	7.7 µm	235.56	Plano	4.5
LLU-25-610-λ	UVFS	1" dia.	620.6 mm	23.5 mm	9.9 µm	302.85	Plano	4.5
LLU-25-760-λ	UVFS	1" dia.	789.8 mm	23.5 mm	12.3 µm	385.44	Plano	4.5
LLU-25-1000-λ	UVFS	1" dia.	965.2 mm	23.5 mm	16.2 µm	471.01	Plano	4.0
LLU-25-2000-λ	UVFS	1" dia.	2174.3 mm	23.5 mm	32.4 µm	1061 04	Plano	4.0
LLU-51-150-λ	UVFS	2" dia.	150.5 mm	11.9 mm	4.8 µm	84.82	-529.26	8.5
LLU-51-190-λ	UVFS	2" dia.	189.5 mm	14.0 mm	5.2 µm	111.60	-529.26	7.0
LLU-51-240-λ	UVFS	2" dia.	238.1 mm	16.6 mm	5.5 µm	136.75	-760.00	6.5
LLU-51-300-λ	UVFS	2" dia.	300.2 mm	19.7 mm	5.8 µm	169.63	-1061.04	6.5
LLU-51-380-λ	UVFS	2" dia.	381.2 mm	23.5 mm	6.2 µm	225.22	-1061.04	5.5
LLU-51-475-λ	UVFS	2" dia.	475.1 mm	27.8 mm	6.5 µm	260.90	-2068.17	5.5
LLU-51-610-λ	UVFS	2" dia.	611.6 mm	33.6 mm	6.9 µm	357.41	-1800	5.5
LLU-51-760-λ	UVFS	2" dia.	762.7 mm	39.5 mm	7.3 µm	438.93	-2440	5.0
LLU-51-1000-λ	UVFS	2" dia.	992.3 mm	48.5 mm	7.9 µm	484.25	Plano	5.0
Other diameters and focal lengths available on custom basis. Please inquire.

Optics for Research · Ph 973-228-4480 · Fax 973-228-0915 · Email: info@ofr.com