MicroSpot Objectives are supplied with high
energy-resistant, multilayer antireflection coatings optimized
for either a specific excimer laser wavelength or a broadband
range of wavelengths within the design spectrum. Standard
coatings are shown below. When ordering, replace the "λ" at the end of the part number with the appropriate wavelength
(nm) or coating code.
Transmission is more than adequate for video
monitoring in the visible. For use outside the UV design spectrum,
discuss with OFR.
Contact OFR for information concerning direct
and remote monitoring, and individual model performance at
other wavelengths.
Antireflection Coatings
Narrowband AR Coatings
Center
Wavelength
Bandwidth
Max Reflection per Surface
Power
Handling
193 nm
192 - 194 nm
< 1.5%
100 MW/cm2
248 nm
240 - 260 nm
< 0.5%
200 MW/cm2
266 nm
255 - 280 nm
< 0.35%
500 MW/cm2
351/354 nm
340 - 370 nm
< 0.25%
500 MW/cm2
Broadband AR Coatings
Coating Code
Bandwidth
Max Reflection
per Surface
Power
Handling
UVB
240 - 360 nm
1.5%
50 MW/cm2
NUV
325 - 500 nm
1%
50 MW/cm2
Transmission of LMU Series
Objectives
High Power AR Coatings
Objective
Transmission
Note
LMU-5X-193
90%
Transmission depends
on beam diameter and characteristics, and therfore is
not completely predictable, please inquire.
