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OFR's all-refractive UV Achromatic MicroSpot Focusing Objectives are designed for use with high power, UV excimer lasers and other ultraviolet sources.

Lens elements comprising the LMU Objectives are made from the highest quality, lowest absorption excimer grade fused silica and CaF2 available. For information on material testing under high power UV radiation, the following are recommended:

  • "Optical Materials for Excimer Laser Applications"
    M. Rothschild, Optics & Photonics News, May, 1993

  • "Long-Term Effects of Pulsed KrF Laser Radiation on Crystalline and
    Amorphous SiO2". D.J. Krajnovich, I.K. Pour, SPIE Vol. 2114, Proceedings,
    1993 Boulder Damage Symposium

  • "Excimer Lasers: Applications, Beam Delivery Systems and Laser Design"
    SPIE Vol. 1835, Proceedings, Nov. 1992 Boston Conference

  • "Improvements in Crystal Optics for Excimer Lasers"
    Toepke, D. Cope, Harshaw/Bicron Crystal Products Group

 

Specifications
Materials Excimer-Grade Fused Silica
Excimer-Grade Calcium Flouride
Design Spectrum 193 - 450 nm
Energy Throughput 96 - 98%

 

LMUL UV Objective

LMU UV Objective

Equipped with the universal standard
Royal Microscope Society (RMS) thread
(Whitworth 0.8" x 36 TPI).

UV MicroSpot Focusing Objective
Catalog
Number
Working
Distance
EFL
NA
Theoretical
Focus Spot
Entrance
Aperture
D
L
LMU-3X-λ  49 mm 60 mm 0.08 5 µm* 10 mm
21 mm
26 mm
LMU-5X-λ 35 mm  40 mm 0.13 3 µm* 10 mm
21 mm
24 mm
LMU-10X-λ 15 mm  20 mm 0.25 2 µm* 10 mm
21 mm
32 mm
LMU-15X-λ 8.5 mm  13 mm 0.32 1 µm* 8.5 mm
21 mm
36 mm
LMU-20X-λ 4 mm  10 mm 0.40 1 µm* 8 mm
21 mm
35 mm
LMU-39X-λ** 2 mm  5 mm 0.50 1 µm* 5 mm
21 mm
34 mm
LMU-40X-λ 1 mm  5 mm 0.50 1 µm* 5 mm
21 mm
34 mm
LMUL-20X-λ  19 mm 10 mm 0.40 Discuss 8 mm See drawing

 When ordering, specify coating according to wavelength and power rating by adding the appropriate coating code, for example, LMUL-20X-266 or LMU-10X-UVB.
* Note that Theoretical Focal Spot Diameter values are based on a Gaussian profile input beam at Design Wavelength which fills the Entrance Aperture at the 1/e2 limits.
** Optimized for use 325 - 650nm. Inquire for coating options.
† ZERO-POWER ACHROMATIZER available, See page 7.


 

Antireflection Coatings

Narrowband AR Coatings

Center
Wavelength

Bandwidth

Max Reflection per Surface

Power
Handling

193 nm

192 - 194 nm

< 1.5%

100 MW/cm2

248 nm

240 - 260 nm

< 0.5%

200 MW/cm2

266 nm

255 - 280 nm

< 0.35%

500 MW/cm2

351/354 nm

340 - 370 nm

< 0.25%

500 MW/cm2

 

Broadband AR Coatings

Coating Code

Bandwidth

Max Reflection
per Surface

Power
Handling

UVB

240 - 360 nm

1.5%

50 MW/cm2

NUV

325 - 500 nm

1%

50 MW/cm2

 

 

 

 

 

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